Showing posts with label fabricating Poly Gate. Show all posts
Showing posts with label fabricating Poly Gate. Show all posts
Friday, July 3, 2009
Process sequence for fabricating Poly Gate
I am wondering the "correct" sequence for fabricating a layer of gate oxide and poly gate on a bare silicon substrate. The substrate is also implanted with boron. So this is my thinking: bare silicon substrate -> coated with photoresist -> selectively exposed -> exposed region implanted with boron -> then strip the unexposed photoresist. At this point, I am confused on how to proceed to build the layer of gate oxide on which the poly gate is directly built. I will appreciate guidance on how to proceed to build the structure further.
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